توضیحات :
NFPA 318 – Standard for the Protection of Semiconductor Fabrication Facilities
۲۰۲۲ Edition
Chapter 1 Administration
۱-۱* Scope. This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.
۱-۲* Purpose. This standard is intended to provide reasonable safeguards for the protection of facilities containing cleanrooms from fire and related hazards. These safeguards are intended to provide protection against injury, loss of life, and property damage.
۱-۳ Retroactivity. The provisions of this standard reflect a consensus of what is necessary to provide an acceptable degree of protection from the hazards addressed in d1is standard at me time the standard was issued.
۱-۳-۱ Unless otherwise specified, the provisions of this standard shall not apply to facilities, equipment, structures, or installations that existed or were approved for construction or installation prior to the effective elate of me standard. Where specified, me provisions of t his standard shall be retroactive.
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